Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors

被引：14

作者：

Nishino, Hitoshi ^{[1
]}

Yano, Yuichiro ^{[2
]}

Hara, Motoaki ^{[2
]}

Toda, Masaya ^{[1
]}

Kajita, Masatoshi ^{[2
]}

Ido, Tetsuya ^{[2
]}

Ono, Takahito ^{[1
,3
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Mech Syst Engn, Sendai, Miyagi 9808579, Japan

[2] Natl Inst Informat & Commun Technol, Koganei, Tokyo 1848795, Japan

[3] Tohoku Univ, Micro Syst Integrat Ctr, Sendai, Miyagi 9800845, Japan

来源：

OPTICS LETTERS | 2021年 / 46卷 / 10期

关键词：

Allan deviation - Anodic bonding - Averaging time - Bragg reflector mirrors - Chip-scale atomic clocks - Clock stability - Coherent population trapping resonance - Reflection type;

D O I：

10.1364/OL.424354

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This Letter reports the design, fabrication, and evaluation of reflection-type planar vapor cells for chip-scale atomic clocks. The cell with 2-8 mm cavity length contains two 45 degrees Bragg reflector mirrors assembled using a local anodic bonding. Coherent population trapping resonance of Rb atoms is observed, realizing an atomic dock operation. Allan deviations at an averaging time of 1 s are 2.2 x 10(-)(10) and 9.5 x 10(-11) for 2 mm long and 6 mm long vapor cells, respectively. These results show that planar vapor cells compatible with a system-in-package are feasible without degradation of clock stabilities compared to conventional vertically stacked cells. (C) 2021 Optical Society of America

引用

页码：2272 / 2275

页数：4

共 15 条

[1] A REFLECTION TYPE VAPOR CELL BASED ON LOCAL ANODIC BONDING OF 45° MIRRORS FOR MICRO ATOMIC CLOCKS
Nishino, Hitoshi
Toda, Masaya
Yano, Yuichiro
Kajita, Masatoshi
Ido, Tetsuya
Hara, Motoaki
Ono, Takahito
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 1530 - 1532
[2] A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks
Nishino, Hitoshi
Hara, Motoaki
Yano, Yuichiro
Toda, Masaya
Kanamori, Yoshiaki
Kajita, Masatoshi
Ido, Tetsuya
Ono, Takahito
APPLIED PHYSICS EXPRESS, 2019, 12 (07)
[3] A REFLECTION-TYPE VAPOR CELL FOR MICRO ATOMIC CLOCK
Nishino, Hitoshi
Toda, Masaya
Kanamori, Yoshiaki
Yano, Yuichiro
Kajita, Masatoshi
Ido, Tetsuya
Hara, Motoaki
Ono, Takahito
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2019, : 915 - 918
[4] MICRO VAPOR CELLS SEALED BY TWO-STEP BONDING FOR MINIATURE ATOMIC CLOCKS
Nishino, Hitoshi
Furuya, Yasubumi
Ono, Takahito
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 2022, : 983 - 986
[5] Ramsey Spectroscopy in a Micro-Fabricated Rb Vapor Cell for Miniature Atomic Clocks
Batori, E.
Affolderbach, C.
Pellaton, M.
Grnet, F.
Mileti, G.
Su, Y.
Violetti, M.
Skrivervik, A. K.
2021 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IEEE EFTF-IFCS 2021), 2021,
[6] Atomic Vapor Cell Fabrication for Atomic Clock Based on Vacuum Packaging by Multi-stack Anodic Bonding Using Two Electrodes
Xu, Jian
Zhang, Tingkai
Gan, Zhiyin
Liu, Sheng
2010 11TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING (ICEPT-HDP), 2010, : 1342 - 1345
[7] Stable 85Rb micro vapour cells: fabrication based on anodic bonding and application in chip-scale atomic clocks
Su Juan
Deng Ke
Guo Deng-Zhu
Wang Zhong
Chen Jing
Zhang Geng-Min
Chen Xu-Zong
CHINESE PHYSICS B, 2010, 19 (11)
[8] Stable 85Rb micro vapour cells:fabrication based on anodic bonding and application in chip-scale atomic clocks
苏娟
邓科
郭等柱
汪中
陈兢
张耿民
陈徐宗
Chinese Physics B, 2010, 19 (11) : 247 - 254
[9] Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods
Langa, S.
Drabe, C.
Kunath, C.
Dreyhaupt, A.
Schenk, H.
RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MOEMS/MEMS AND NANODEVICES XII, 2013, 8614
[10] Micro-fabricated vapor cells with sealed Rb atoms by distillation at wafer level and two-step bonding for miniature atomic clocks
Nishino, Hitoshi
Furuya, Yasubumi
Ono, Takahito
OPTICS EXPRESS, 2021, 29 (26): : 44316 - 44321

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