From the implementation to the characterisation and assembling of microfabricated optical alcali vapor cell for mems atomic clocks

We describe the fabrication of miniature alkali atom vapor cells using silicon micromachining and anodic bonding. Such cells consist of cavities etched in silicon, with internal volumes of few mm(3). Original technique for introducing cesium into the cells is described; based on local heating of alkali dispenser. Cesium absorption and coherent population trapping resonances were measured in the cells.