Adaptation, measurement system for electric and photoelectric characterization of semiconductor materials and devices

被引：0
|
作者：
Cwirko, Joanna [1 ]
Cwirko, Robert [1 ]
机构：
[1] Wojskowa Akad Tech, Wydzial Elekt, PL-00908 Warsaw, Poland
来源：
PRZEGLAD ELEKTROTECHNICZNY | 2008年 / 84卷 / 05期
关键词：
semiconductor measurement; deep level centers; MPC; PITS; DLTS; LFNS; multimethod measurement system;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper is presented multimethod, adaptation, measurement system for electric and photoelectric characterization of semiconductor materials and devices. The unique features of present system is comprehensive approach to characterization of material electrical properties. System utilities the powerful techniques as: Photo-Induced Transient Spectroscopy PITS, Modulated Photocurrent Method MPC Low Frequency Noise Spectroscopy LFNS and Deep Level Transient Spectroscopy DLTS.
引用
收藏
页码：265 / 268
页数：4
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