Single-crystalline silicon thin-film transistor on glass

被引：0

作者：

Shi, XJ ^{[1
]}

Wong, M ^{[1
]}

Henttinen, K ^{[1
]}

Suni, T ^{[1
]}

Suni, I ^{[1
]}

Lau, SS ^{[1
]}

机构：

[1] Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China

来源：

2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS | 2004年

关键词：

glass. ion cutting; layer transfer; single-crystalline silicon; thin-film transistor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Single-crystalline silicon-on-glass (cSOG) has been obtained using an -ion-cutting" based layer-transfer technique. Compared to previous attempts of realizing cSOG, extended silicon etching is not required and bulk silicon, instead of the relatively more expensive siliconon-insulator donor wafers, can be used. Thin-film transistors based on cSOG have been fabricated and characterized. The stability of cSOG Thin-film transistors with or without laser-induced annealing is reported.

引用

页码：265 / 268

页数：4

共 50 条

[21] Towards wafer quality crystalline silicon thin-film solar cells on glass
Haschke, Jan
Amkreutz, Daniel
Korte, Lars
Ruske, Florian
Rech, Bernd
[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2014, 128 : 190 - 197
[22] Mitigating optical losses in crystalline silicon thin-film solar cells on glass
Eisenhauer, David
Rech, Bernd
Becker, Christiane
[J]. 2018 IEEE 7TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION (WCPEC) (A JOINT CONFERENCE OF 45TH IEEE PVSC, 28TH PVSEC & 34TH EU PVSEC), 2018, : 0309 - 0313
[23] Performance Analysis of Thin-Film Crystalline Silicon-on-Glass Solar Cells
Grancic, B.
Solntsev, S.
Zeman, M.
[J]. IEEE JOURNAL OF PHOTOVOLTAICS, 2013, 3 (04): : 1144 - 1148
[24] Formation of thin-film crystalline silicon on glass observed by in-situ XRD
Westra, J. M.
Vavrunkova, V.
Sutta, P.
van Swaaij, R. A. C. M. M.
Zeman, M.
[J]. PROCEEDINGS OF INORGANIC AND NANOSTRUCTURED PHOTOVOLTAICS, 2010, 2 (01): : 235 - 241
[25] Single-crystalline silicon nanomembrane thin-film transistors with anodized aluminum oxide as a gate dielectric on rigid and flexible substrates
Yang, Xiaodong
Geng, Bowen
Wei, Junqing
Wang, Zhi
Lan, Kuibo
Ren, Xiaochen
Qin, Guoxuan
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (17)
[26] NON-CRYSTALLINE SILICON THIN-FILM
IMURA, T
HIRAKI, A
[J]. JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS, 1983, 8 : 155 - 171
[27] A polycrystalline silicon thin-film transistor with a thin amorphous buffer
Kim, KW
Cho, KS
Jang, J
[J]. IEEE ELECTRON DEVICE LETTERS, 1999, 20 (11) : 560 - 562
[28] A Novel Agglomerated-Silicon Thin-Film Transistor
Afentakis, Themistokles
Sposili, Robert S.
Voutsas, Apostolos
[J]. IEEE ELECTRON DEVICE LETTERS, 2010, 31 (01) : 50 - 52
[29] Characteristics of hydrogenated amorphous silicon thin-film transistor
Kim, Jeong Hyun
Oh, Eui Yeol
Hong, Chan Hee
[J]. Journal of Applied Physics, 1994, 76 (11):
[30] AMORPHOUS SILICON THIN-FILM TRANSISTOR - THEORY AND EXPERIMENT
NEUDECK, GW
MALHOTRA, AK
[J]. SOLID-STATE ELECTRONICS, 1976, 19 (08) : 721 - 729

← 1 2 3 4 5 →