共 50 条
- [44] Growth orientation of poly-Si film by hot-wire chemical vapor deposition Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2007, 27 (01): : 76 - 79
- [46] Quality and Growth Rate of Hot-Wire Chemical Vapor Deposition Epitaxial Si Layers AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, 2008, 1066 : 285 - 289