Synthesis of carbon nanowalls by hot-wire chemical vapor deposition

被引：25
|
作者：
Itoh, Takashi [1 ]
机构：
[1] Gifu Univ, Gifu 5011193, Japan
来源：
THIN SOLID FILMS | 2011年 / 519卷 / 14期
关键词：
Carbon nanowall; Hot-wire CVD; Graphene; Hydrogen radical; Substrate surface temperature; DIAMOND; GROWTH; FILMS; CVD;
D O I：
10.1016/j.tsf.2011.01.308
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Carbon nanowall (CNW) is a carbon nano-material which has a wall structure that stood on substrates. CNWs can be synthesized by hot-wire chemical vapor deposition (HWCVD) using methane without hydrogen dilution. The synthesis of CNWs by HWCVD is discussed along with reviewing the experimental results. The growth of CNWs is affected by hydrogen dilution ratio and substrate surface temperature. Based on these results, it is suggested that hydrogen radical density and substrate surface temperature are the important parameters for the synthesis of CNWs. The growth process of CNWs is also discussed. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：4589 / 4593
页数：5
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