Growth orientation of poly-Si film by hot-wire chemical vapor deposition

被引：0
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作者：
Chai, Zhan [1 ]
Zhang, Guifeng [1 ]
Wang, Sai [1 ]
Hou, Xiaoduo [1 ]
机构：
[1] State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2007年 / 27卷 / 01期
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页码：76 / 79
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