Preparation and characterization of barium strontium titanate thin films by chemical solution deposition

被引：9
|
作者：
Borderon, C. [1 ]
Averty, D. [1 ]
Seveno, R. [1 ]
Gundel, H. W. [1 ]
机构：
[1] Univ Nantes, IREENA, EA 1770, F-44322 Nantes, France
来源：
FERROELECTRICS | 2008年 / 362卷
关键词：
BST; thin films; ferroelectric; paraelectric; steel substrate; tunability; dielectric losses;
D O I：
10.1080/00150190801996973
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In the present study, Ba0.70Sr0.30TiO3 thin films were realized by chemical solution deposition based on the use of an alkoxide precursor The solution is spin-coated onto stainless steel substrates and a classical multi-layer technique was used in order to obtain thicker films. The elaboration route is described and a study of the temperature dependence of the crystallization process is presented. The ferroelectric and the dielectric (permittivity and tan delta) properties were determined at different temperatures in order to determine the evolution of the tunability and the figure of merit of the films.
引用
收藏
页码：1 / 7
页数：7
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