Effect of deposition temperature on the structure and electrical properties of thin barium strontium titanate films

被引：8
|
作者：
Tumarkin, A. V. [1 ]
Mikhailov, A. K. [1 ]
Altynnikov, A. G. [1 ]
机构：
[1] St Petersburg State Electrotech Univ, St Petersburg 197376, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2008年 / 34卷 / 09期
关键词：
81.15.kk; 77.84.Dy; 68.55.aj;
D O I：
10.1134/S1063785008090186
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have studied the properties of thin ferroelectric films of barium strontium titanate (Ba,Sr)TiO3 (BSTO) obtained by RF ion-plasma deposition at various substrate temperatures in the 700-900 degrees C range. It is established that BSTO films deposited at 700-800 degrees C exhibit a polycrystalline structure. Beginning with 800 degrees C, the film structure changes so that an (111)-oriented phase appears and becomes predominating. The effect of the deposition temperature on the grain size and the relationship between the structural features and electrical properties of the films are considered.
引用
收藏
页码：776 / 778
页数：3
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