Effect of deposition temperature on the structure and electrical properties of thin barium strontium titanate films

被引：0
|
作者：
A. V. Tumarkin
A. K. Mikhailov
A. G. Altynnikov
机构：
[1] St. Petersburg State Electrotechnical University,
来源：
Technical Physics Letters | 2008年 / 34卷
关键词：
81.15.kk; 77.84.Dy; 68.55.aj;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We have studied the properties of thin ferroelectric films of barium strontium titanate (Ba,Sr)TiO3 (BSTO) obtained by RF ion-plasma deposition at various substrate temperatures in the 700–900°C range. It is established that BSTO films deposited at 700–800°C exhibit a polycrystalline structure. Beginning with 800°C, the film structure changes so that an (111)-oriented phase appears and becomes predominating. The effect of the deposition temperature on the grain size and the relationship between the structural features and electrical properties of the films are considered.
引用
收藏
页码：776 / 778
页数：2
相关论文
共 50 条
  • [1] Effect of deposition temperature on the structure and electrical properties of thin barium strontium titanate films
    Tumarkin, A. V.
    Mikhailov, A. K.
    Altynnikov, A. G.
    [J]. TECHNICAL PHYSICS LETTERS, 2008, 34 (09) : 776 - 778
  • [2] Ionic radius effect on structural and electrical properties of barium strontium titanate thin films
    Gatea, Hamed. A.
    Obaid, Maithm. A.
    Mohammed, Abdulkareem M.
    [J]. DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 2024, 19 (03) : 1117 - 1127
  • [3] The Effect of Deposition Time on Sputtered Barium Strontium Titanate Thin Films
    Jamaluddin, F. W.
    Khalid, M. F.
    Mamat, M. H.
    Zoolfakar, A. S.
    [J]. 2017 IEEE 13TH MALAYSIA INTERNATIONAL CONFERENCE ON COMMUNICATIONS (MICC), 2017, : 63 - 65
  • [4] Structure and electrical properties of barium strontium titanate thin films directly prepared on bare silicon substrates by chemical solution deposition
    Bao, Dinghua
    Ruan, Kaibin
    Liang, Tong
    Yao, Xi
    [J]. FERROELECTRICS, 2007, 357 : 115 - 120
  • [5] Electrical Properties of Barium Strontium Titanate Thin Films for Embedded Capacitor Applications
    Peelamedu, Raviprakash
    Prakash, Adithya
    Velez, Victor H.
    Sundaram, Kalpathy B.
    [J]. IEEE SOUTHEASTCON 2015, 2015,
  • [6] Effect of dopants on the band structure of barium strontium titanate thin films
    Zheng, YB
    Wang, SJ
    Huan, CHA
    [J]. MICRO- AND NANOSYSTEMS-MATERIALS AND DEVICES, 2005, 872 : 291 - 295
  • [7] The effect of stress on the dielectric properties of barium strontium titanate thin films
    Shaw, TM
    Suo, Z
    Huang, M
    Liniger, E
    Laibowitz, RB
    Baniecki, JD
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (14) : 2129 - 2131
  • [8] Poling Effect on Microstructure Properties of Barium Strontium Titanate Thin Films
    Yusof, H. Mohd
    Najamudin, S. H.
    Saif, Ala'eddin A.
    Poopalan, P.
    [J]. PROCEEDINGS 2015 2ND INTERNATIONAL CONFERENCE ON BIOMEDICAL ENGINEERING (ICOBE 2015), 2015,
  • [9] Low-temperature deposition of (110)-oriented barium titanate thin films and their electrical properties
    Lee, JT
    Su, QX
    Rabson, TA
    Robert, MA
    [J]. INTEGRATED FERROELECTRICS, 1999, 24 (1-4) : 75 - 84
  • [10] Effect of bottom electrodes on the dielectric properties of barium strontium titanate thin films
    Yu, HC
    Li, M
    Hui, C
    Xu, AL
    Shao, WW
    [J]. THIN SOLID FILMS, 2005, 493 (1-2) : 20 - 23
12345