Effect of deposition temperature on the structure and electrical properties of thin barium strontium titanate films

被引：0
|
作者：
A. V. Tumarkin
A. K. Mikhailov
A. G. Altynnikov
机构：
[1] St. Petersburg State Electrotechnical University,
来源：
Technical Physics Letters | 2008年 / 34卷
关键词：
81.15.kk; 77.84.Dy; 68.55.aj;
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暂无
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摘要：
We have studied the properties of thin ferroelectric films of barium strontium titanate (Ba,Sr)TiO3 (BSTO) obtained by RF ion-plasma deposition at various substrate temperatures in the 700–900°C range. It is established that BSTO films deposited at 700–800°C exhibit a polycrystalline structure. Beginning with 800°C, the film structure changes so that an (111)-oriented phase appears and becomes predominating. The effect of the deposition temperature on the grain size and the relationship between the structural features and electrical properties of the films are considered.
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页码：776 / 778
页数：2
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