Piezoelectric MEMS for acoustic and ultrasonic applications

被引：4
|
作者：
Wu, Lixiang [1 ]
Xu, Tingzhong [1 ]
Abbaszadeh, Javad [1 ]
Moridi, Mohssen [1 ]
机构：
[1] Silicon Austria Labs GmbH, Villach, Austria
来源：
2022 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF-PFM-ECAPD 2022) | 2022年
基金：
欧盟地平线“2020”;
关键词：
Piezoelectric microelectromechanical systems (PiezoMEMS); piezoelectric microphone; piezoelectric micromachined ultrasonic transducer (PMUT); piezoelectric thin films; lead zirconate titanate (PZT);
D O I：
10.1109/ISAF51494.2022.9870162
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Microelectromechanical systems (MEMS) integrated with piezoelectric thin films such as lead zirconate titanate (PZT) and aluminum scandium nitride (AlScN) have played a major role in acoustic and ultrasonic applications. This paper introduces piezoelectric MEMS devices including piezoelectric microphones and piezoelectric micromachined ultrasonic transducers (PMUTs) along with their target applications at various working frequency ranges, such as dual-frequency piezoelectric MEMS microphones for wind tunnel testing, dual-frequency PMUTs for super harmonic imaging, and air-coupled PMUTs with significantly extended bandwidth for gas flow metering.
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页数：3
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