Piezoelectric MEMS for acoustic and ultrasonic applications

被引：4
|
作者：
Wu, Lixiang [1 ]
Xu, Tingzhong [1 ]
Abbaszadeh, Javad [1 ]
Moridi, Mohssen [1 ]
机构：
[1] Silicon Austria Labs GmbH, Villach, Austria
来源：
2022 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF-PFM-ECAPD 2022) | 2022年
基金：
欧盟地平线“2020”;
关键词：
Piezoelectric microelectromechanical systems (PiezoMEMS); piezoelectric microphone; piezoelectric micromachined ultrasonic transducer (PMUT); piezoelectric thin films; lead zirconate titanate (PZT);
D O I：
10.1109/ISAF51494.2022.9870162
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Microelectromechanical systems (MEMS) integrated with piezoelectric thin films such as lead zirconate titanate (PZT) and aluminum scandium nitride (AlScN) have played a major role in acoustic and ultrasonic applications. This paper introduces piezoelectric MEMS devices including piezoelectric microphones and piezoelectric micromachined ultrasonic transducers (PMUTs) along with their target applications at various working frequency ranges, such as dual-frequency piezoelectric MEMS microphones for wind tunnel testing, dual-frequency PMUTs for super harmonic imaging, and air-coupled PMUTs with significantly extended bandwidth for gas flow metering.
引用
收藏
页数：3
相关论文
共 50 条
  • [21] MEMS BASED PIEZOELECTRIC ULTRASONIC ENERGY HARVESTER FOR SELF-POWERED UNDER-WATER APPLICATIONS
    Shi, Qiongfeng
    Wang, Tao
    Kobayashi, Takeshi
    Lee, Chengkuo
    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2016, : 1256 - 1259
  • [22] Acoustic MEMS Transducers for Biomedical Applications
    Kim, Eun Sok
    2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, : 71 - 76
  • [23] PIEZOELECTRIC POLYMER PROBE FOR ULTRASONIC APPLICATIONS
    DEREGGI, AS
    ROTH, SC
    KENNEY, JM
    EDELMAN, S
    HARRIS, GR
    JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1981, 69 (03): : 853 - 859
  • [24] Piezoelectric Thin Films Characterization for MEMS Applications
    Al Ahmad, Mahmoud
    Plana, R.
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 514 - 517
  • [25] Piezoelectric MEMS Linear Motor for Nanopositioning Applications
    Ruiz-Diez, Victor
    Hernando-Garcia, Jorge
    Toledo, Javier
    Ababneh, Abdallah
    Seidel, Helmut
    Sanchez-Rojas, Jose Luis
    ACTUATORS, 2021, 10 (02) : 1 - 11
  • [26] Piezoelectric energy harvesting for bio MEMS applications
    Ramsay, MJ
    Clark, WW
    SMART STRUCTURES AND MATERIALS 2001: INDUSTRIAL AND COMMERCIAL APPLICATIONS OF SMART STRUCTURES TECHNOLOGIES, 2001, 4332 : 429 - 438
  • [27] Piezoelectric thin films and their applications in MEMS: A review
    Liu, Jinpeng
    Tan, Hua
    Zhou, Xinyi
    Ma, Weigang
    Wang, Chuanmin
    Tran, Nguyen-Minh-An
    Lu, Wenlong
    Chen, Feng
    Wang, Junya
    Zhang, Haibo
    JOURNAL OF APPLIED PHYSICS, 2025, 137 (02)
  • [28] A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
    Prashanthi, K.
    Naresh, M.
    Seena, V.
    Thundat, T.
    Rao, V. Ramgopal
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (02) : 259 - 261
  • [29] An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
    Williams, Matthew D.
    Griffin, Benjamin A.
    Reagan, Tiffany N.
    Underbrink, James R.
    Sheplak, Mark
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (02) : 270 - 283
  • [30] An ultrasonic MEMS particle separator with thick film piezoelectric actuation
    Hill, M
    Townsend, RJ
    Harris, NR
    White, NM
    Beeby, SP
    Ding, JX
    2005 IEEE Ultrasonics Symposium, Vols 1-4, 2005, : 1160 - 1163
12345