Qualification and applications of a piezoelectric MEMS process

被引：0

作者：

Poppe, E. ^{[1
]}

Ostbo, N. P. ^{[1
]}

Booij, W. ^{[1
,2
]}

Tyholdt, F. ^{[1
]}

Calame, F. ^{[3
]}

Hok, B. ^{[4
]}

Jensen, F. ^{[5
]}

Raeder, H. ^{[2
]}

Muralt, P. ^{[3
]}

机构：

[1] SINTEF, Oslo, Norway

[2] Sonitor Technol AS, Oslo, Norway

[3] Ecole Polytech Fed Lausanne, Lab Ceramique, Lausanne, Switzerland

[4] Hok Instrument AB, Vasteras, Sweden

[5] Noliac AS, Kvistgaard, Denmark

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

PZT; transducer; MEMS; reliability; chemical solution deposition;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of similar to 50% of the devices exposed to thermal aging were found to fail at 85 degrees C-85%RH (relative humidity), while a real-life test of 8.10(10) cycles at resonance only gives a slight change in Q-value and resonance frequency.

引用

页数：2

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