Qualification and applications of a piezoelectric MEMS process

被引：0

作者：

Poppe, E. ^{[1
]}

Ostbo, N. P. ^{[1
]}

Booij, W. ^{[1
,2
]}

Tyholdt, F. ^{[1
]}

Calame, F. ^{[3
]}

Hok, B. ^{[4
]}

Jensen, F. ^{[5
]}

Raeder, H. ^{[2
]}

Muralt, P. ^{[3
]}

机构：

[1] SINTEF, Oslo, Norway

[2] Sonitor Technol AS, Oslo, Norway

[3] Ecole Polytech Fed Lausanne, Lab Ceramique, Lausanne, Switzerland

[4] Hok Instrument AB, Vasteras, Sweden

[5] Noliac AS, Kvistgaard, Denmark

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

PZT; transducer; MEMS; reliability; chemical solution deposition;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of similar to 50% of the devices exposed to thermal aging were found to fail at 85 degrees C-85%RH (relative humidity), while a real-life test of 8.10(10) cycles at resonance only gives a slight change in Q-value and resonance frequency.

引用

页数：2

共 50 条

[21] Evolving MEMS Qualification Requirements
Olney, Andrew
2010 INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, 2010, : 224 - 230
[22] Improved test setup for MEMS mechanical strength investigations and fabrication process qualification
Bandi, T.
Maeder, X.
Dommann, A.
Shea, H.
Neels, A.
RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MOEMS/MEMS, NANODEVICES, AND NANOMATERIALS XIII, 2014, 8975
[23] Comb IDE Patterned Piezoelectric MEMS Cantilever for Sensing Applications
Mukhija, Neha
Paliwal, Nidhi
Bhatia, Deepak
2015 4TH INTERNATIONAL CONFERENCE ON RELIABILITY, INFOCOM TECHNOLOGIES AND OPTIMIZATION (ICRITO) (TRENDS AND FUTURE DIRECTIONS), 2015,
[24] Preparation of piezoelectric PZT thin films by MOCVD for MEMS applications
Chen, IS
Kim, DJ
Maria, JP
Roeder, JF
Kingon, AI
FERROELECTRIC THIN FILMS VIII, 2000, 596 : 541 - 547
[25] Measurement of piezoelectric strength of ZnO thin films for MEMS applications
von Preissig, FJ
Zeng, H
Kim, ES
SMART MATERIALS & STRUCTURES, 1998, 7 (03): : 396 - 403
[26] Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications
Zhang, Meng
Yang, Jian
Si, Chaowei
Han, Guowei
Zhao, Yongmei
Ning, Jin
MICROMACHINES, 2015, 6 (09): : 1236 - 1248
[27] Piezoelectric MEMS Energy Harvester for Low-Power Applications
Muscalu, George
Firtat, Bogdan
Anghelescu, Adrian
Moldovan, Carmen
Dinulescu, Silviu
Brasoveanu, Costin
Ekwinska, Magdalena
Szmigiel, Dariusz
Zaborowski, Michal
Zajac, Jerzy
Stan, Ion
Tulbure, Adrian
ELECTRONICS, 2024, 13 (11)
[28] Piezoelectric actuated MEMS for use in microwave switching and filtering applications
Dehoff, Carsten
Hennings, Alexander
Kuegeler, Carsten
Schneller, Theodor
Boettger, Ulrich
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (02): : 343 - 356
[29] Recent development and futuristic applications of MEMS based piezoelectric microphones
Kumar, Ashish
Varghese, Arathy
Sharma, Anup
Prasad, Mahanth
Janyani, Vijay
Yadav, R.P.
Elgaid, Khaled
Sensors and Actuators A: Physical, 2022, 347
[30] Piezoelectric Based MEMS Acoustic Sensor for Wide Frequency Applications
Ali, Washim Reza
Prasad, Mahanth
IEEE SENSORS JOURNAL, 2021, 21 (24) : 27352 - 27360

← 1 2 3 4 5 →