Role of electron thermal motion in evanescent electromagnetic wave structure of inductively coupled plasma

被引：2

作者：

Takechi, S ^{[1
]}

Shinohara, S ^{[1
]}

机构：

[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 8168580, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1999年 / 38卷 / 2A期

关键词：

RF plasma; ICP; spiral antenna; evanescent wave; antenna-plasma loading resistance; collisionality; electron thermal motion; nonlocal model; resonant coupling;

D O I：

10.1143/JJAP.38.L148

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The role of electron thermal motion in radio-frequency (RF) plasma produced by a planar, spiral antenna was examined. The measured evanescent wave amplitude and the phase were compared to the calculated results obtained from a one-dimensional collisionless (nonlocal) model, changing the boundary condition, Ar filling pressure and RF frequency. It was demonstrated that electron thermal motion plays a more important role under the condition of low collisionality.

引用

页码：L148 / L150

页数：3

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