Role of electron thermal motion in evanescent electromagnetic wave structure of inductively coupled plasma

被引：0

作者：

Takechi, Seiji ^{[1
]}

Shinohara, Shunjiro ^{[1
]}

机构：

[1] Kyushu Univ, Fukuoka, Japan

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 1999年 / 38卷 / 2 A期

关键词：

Experimental; (EXP);

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The role of electron thermal motion in radio-frequency (RF) plasma produced by a planar, spiral antenna was examined. The measured evanescent wave amplitude and the phase were compared to the calculated results obtained from a one-dimensional collisionless (nonlocal) model, changing the boundary condition, Ar filling pressure and RF frequency. It was demonstrated that electron thermal motion plays a more important role under the condition of low collisionality.

引用

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