Influence of optical probe packaging on a 3D MEMS scanning micro-mirror for optical coherence tomography (OCT) applications

被引：2

作者：

Khairyanto, C. S. Premachandran Ahmad ^{[1
]}

Chen, Kelvin ^{[1
]}

Singh, Jank ^{[1
]}

Wang, Sandy X. L. ^{[1
]}

Xu Yingshun ^{[2
]}

Chen Nanguang ^{[2
]}

Sheppard, C. J. R. ^{[2
]}

Olivo, Malini ^{[3
]}

Lau, John ^{[1
]}

机构：

[1] Inst Microelectron, ASTAR, 11 Sci Pk Rd,Singapore Sci Pk 2, Singapore 117685, Singapore

[2] Natl Univ Singapore, Dept Bioengn, Singapore, Singapore

[3] Natl Canc Ctr, Div Med Sci, Singapore 169610, Singapore

来源：

58TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, PROCEEDINGS | 2008年

关键词：

D O I：

10.1109/ECTC.2008.4550072

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An optical probe is developed for imaging in an optical coherence tomography (OCT) system. A 3D micro mirror is used for steering the beam from the source to the sample. A GRIN lens, fiber and micro mirror are assembled in a silicon optical bench. The assembled components are housed in the bio-compatible microinjection molded housing. The images obtained using this probe is studied with respect to probe assembly. Tolerance of GRIN lens placement, micro mirror placement on the substrate, deformation of the mirror, housing transparency and housing curvature are studied with respect to the final image from the probe. In this study it is found that a higher mirror curvature affects the depth of focus on the sample and mirror placement reduces the coupling efficiency during the optical assembly.

引用

页码：829 / +

页数：2

共 50 条

[41] Endoscopic optical coherence tomography imaging probe using a MEMS actuator
Zara, JM
Izatt, JA
Oberhardt, BJ
Smith, SW
SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY, 2004, 5389 : 324 - 332
[42] 3D In Vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror
Sun, Jingjing
Guo, Shuguang
Wu, Lei
Liu, Lin
Choe, Se-Woon
Sorg, Brian S.
Xie, Huikai
OPTICS EXPRESS, 2010, 18 (12): : 12065 - 12075
[43] MEMS micromirror integrated endoscopic probe for optical coherence tomography bioimaging
Mu, Xiaojing
Sun, Winston
Feng, Hanhua
Yu, Aibin
Chen, Kelvin Wei Sheng
Fu, Chit Yaw
Olivo, Malini
SENSORS AND ACTUATORS A-PHYSICAL, 2011, 168 (01) : 202 - 212
[44] Fast 3D in vivo swept-source optical coherence tomography using a two-axis MEMS scanning micromirror
Kumar, Karthik
Condit, Jonathan C.
McElroy, Austin
Kemp, Nate J.
Hoshino, Kazunori
Milner, Thomas E.
Zhang, Xiaojing
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2008, 10 (04):
[45] Design, Fabrication, and Assembly of an Optical Biosensor Probe Package for OCT (Optical Coherence Tomography) Application
Premachandran, C. S.
Khairyanto, Ahmad
Sheng, Kelvin Chen Wei
Singh, Janak
Teo, Jason
Xu Yingshun
Chen Nanguang
Sheppard, Colin
Olivo, Malini
IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2009, 32 (02): : 417 - 422
[46] Design, fabrication and assembly of an optical biosensor probe package for OCT (optical coherence tomography) application
Premachandran, C. S.
Sheng, Kelvin Chen Wei
Singh, Janak
Teo, Jason
Yingshun, Xu
Nanguang, Chen
Sheppard, Colin
Olivo, Malini
57TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 2007 PROCEEDINGS, 2007, : 1556 - +
[47] 3-d MEMS based minimally invasive optical coherence tomography
McCormick, DT
Jung, W
Chen, ZP
Tien, NC
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2005, : 1644 - 1648
[48] Optical scanning holography based on compressive sensing using a digital micro-mirror device
Sun A-qian
Zhou Ding-fu
Yuan Sheng
Hu You-jun
Zhang Peng
Yue Jian-ming
Zhou Xin
OPTICS COMMUNICATIONS, 2017, 385 : 19 - 24
[49] Optical intensity far-field distribution of MEMS micro-mirror arrays by Fraunhofer diffraction
Zhang, Bin
Zhang, Yu
Yang, Guohui
Wang, Chunhui
APPLIED PHYSICS EXPRESS, 2021, 14 (10)
[50] Analysis of 3D transfer functions of optical coherence tomography
Xiang, JY
Wu, Z
Zeng, SQ
Lui, QM
Zhang, P
Huang, DX
ACTA PHYSICA SINICA, 1999, 48 (10) : 1831 - 1838

← 1 2 3 4 5 →