Optical intensity far-field distribution of MEMS micro-mirror arrays by Fraunhofer diffraction

被引：0
|
作者：
Zhang, Bin [1 ]
Zhang, Yu [1 ]
Yang, Guohui [2 ]
Wang, Chunhui [1 ,3 ]
机构：
[1] Harbin Inst Technol, Natl Key Lab Tunable Laser Technol, Harbin 150001, Heilongjiang, Peoples R China
[2] Harbin Inst Technol, Sch Elect & Informat Engn, Harbin 150080, Heilongjiang, Peoples R China
[3] Shenzhen Glint Inst AI & Robot, Shenzhen 518063, Guangdong, Peoples R China
来源：
APPLIED PHYSICS EXPRESS | 2021年 / 14卷 / 10期
基金：
中国国家自然科学基金;
关键词：
MEMS mirror arrays; Optical intensity; Laser beam; Fraunhofer diffraction;
D O I：
10.35848/1882-0786/ac25c6
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issues. Firstly, the complex amplitudes of laser which is diffracted by 1D (dimension) and 2D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young's double-slit experiment.
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页数：6
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