A metrology of silicon film thermal conductivity using micro-Raman spectroscopy

被引：0
|
作者：
Liu, Xi [1 ,2 ]
Wu, Xiaoming [1 ,2 ]
Ren, Tianling [1 ,2 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China
来源：
2010 IEEE INTERNATIONAL SOI CONFERENCE | 2010年
关键词：
THIN-FILMS; DYNAMICS; LAYERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：2
相关论文
共 50 条
  • [31] Laser heating in porous silicon studied by micro-Raman spectroscopy
    Manotas, S
    Agulló-Rueda, F
    Moreno, JD
    Ben-Hander, F
    Guerrero-Lemus, R
    Martínez-Duart, JM
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2000, 182 (01): : 331 - 334
  • [32] Micro-Raman Spectroscopy on Pentacene Thin-Film Transistors
    Hosoi, Yoshinobu
    Deyra, Daniel Martinez
    Nakajima, Kazuhiro
    Furukawa, Yukio
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2008, 491 : 317 - 323
  • [33] Micro-Raman spectroscopy of graphene
    Simpson, Jeff
    Walker, A. R. Hight
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2009, 238
  • [34] Micro-Raman spectroscopy in medicine
    Krafft, Christoph
    Popp, Juergen
    PHYSICAL SCIENCES REVIEWS, 2019, 4 (10)
  • [35] Micro-Raman spectroscopy of thaumasite
    Brough, AR
    Atkinson, A
    CEMENT AND CONCRETE RESEARCH, 2001, 31 (03) : 421 - 424
  • [36] MICRO-RAMAN SPECTROSCOPY OF CHROMOSOMES
    DEMUL, FFM
    VANWELIE, AGM
    OTTO, C
    MUD, J
    GREVE, J
    JOURNAL OF RAMAN SPECTROSCOPY, 1984, 15 (04) : 268 - 272
  • [37] The comparative study on diamond film by near-field Raman spectroscopy and micro-Raman spectroscopy
    Wang, JJ
    Yan, H
    Dong, YJ
    Li, HD
    Zhang, YF
    Zhang, F
    Xia, ZJ
    Gao, QJ
    Du, WM
    Zhou, HT
    Zou, YH
    SOLID STATE COMMUNICATIONS, 2000, 115 (04) : 173 - 177
  • [38] An experimental analysis of residual stress measurements in porous silicon using micro-raman spectroscopy
    Lei, ZK
    Kang, YL
    Hu, M
    Qiu, Y
    Xu, H
    Niu, HP
    CHINESE PHYSICS LETTERS, 2004, 21 (02) : 403 - 405
  • [39] Purity Evaluation of Highly Oriented Cubic Silicon Carbide Using Micro-Raman Spectroscopy
    Kim, Seul-Ki
    Jung, Eun Young
    Lee, Myung-Hyun
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2022, 23 (03) : 318 - 325
  • [40] Purity Evaluation of Highly Oriented Cubic Silicon Carbide Using Micro-Raman Spectroscopy
    Seul-Ki Kim
    Eun Young Jung
    Myung-Hyun Lee
    Transactions on Electrical and Electronic Materials, 2022, 23 : 318 - 325
12345