A metrology of silicon film thermal conductivity using micro-Raman spectroscopy

被引：0
|
作者：
Liu, Xi [1 ,2 ]
Wu, Xiaoming [1 ,2 ]
Ren, Tianling [1 ,2 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China
来源：
2010 IEEE INTERNATIONAL SOI CONFERENCE | 2010年
关键词：
THIN-FILMS; DYNAMICS; LAYERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：2
相关论文
共 50 条
  • [21] Structural investigation of silicon carbide with micro-Raman spectroscopy
    Borowicz, Pawel
    Gutt, Tomasz
    Malachowski, Tomasz
    Latek, Mariusz
    PRZEGLAD ELEKTROTECHNICZNY, 2010, 86 (11A): : 123 - 128
  • [22] Measurement of the state of stress in silicon with micro-Raman spectroscopy
    Harris, SJ
    O'Neill, AE
    Yang, W
    Gustafson, P
    Boileau, J
    Weber, WH
    Majumdar, B
    Ghosh, S
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (12) : 7195 - 7201
  • [23] Thermal conductivity of GaAs nanowires studied by micro-Raman spectroscopy combined with laser heating
    Soini, Martin
    Zardo, Ilaria
    Uccelli, Emanuele
    Funk, Stefan
    Koblmueller, Gregor
    Fontcuberta i Morral, Anna
    Abstreiter, Gerhard
    APPLIED PHYSICS LETTERS, 2010, 97 (26)
  • [24] Structural Investigation of Silicon Carbide with Micro-Raman Spectroscopy
    Borowicz, Pawel
    Gutt, Tomasz
    Malachowski, Tomasz
    MIXDES 2009: PROCEEDINGS OF THE 16TH INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 2009, : 177 - 180
  • [25] Measurement of the state of stress in silicon with micro-Raman spectroscopy
    Harris, S.J. (sharri42@ford.com), 1600, American Institute of Physics Inc. (96):
  • [26] Influence of local heating on micro-Raman spectroscopy of silicon
    Kouteva-Arguirova, S
    Arguirov, T
    Wolfframm, D
    Reif, J
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (08) : 4946 - 4949
  • [27] MICRO-RAMAN SPECTROSCOPY
    LERNER, JM
    CHEMICAL & ENGINEERING NEWS, 1990, 68 (49) : 5 - 5
  • [28] A universal method for thermal conductivity measurements on micro-/nano-films with and without substrates using micro-Raman spectroscopy
    Wight, N. M.
    Acosta, E.
    Vijayaraghavan, R. K.
    McNally, P. J.
    Smirnov, V
    Bennett, N. S.
    THERMAL SCIENCE AND ENGINEERING PROGRESS, 2017, 3 : 95 - 101
  • [29] Characterization of thin film evaporation in micropillar wicks using micro-Raman spectroscopy
    Zhang, Lenan
    Zhu, Yangying
    Lu, Zhengmao
    Zhao, Lin
    Bagnall, Kevin R.
    Rao, Sameer R.
    Wang, Evelyn N.
    APPLIED PHYSICS LETTERS, 2018, 113 (16)
  • [30] Thermal Expansion Coefficient of Monolayer Molybdenum Disulfide Using Micro-Raman Spectroscopy
    Zhang, Lenan
    Lu, Zhengmao
    Song, Youngsup
    Zhao, Lin
    Bhatia, Bikram
    Bagnall, Kevin R.
    Wang, Evelyn N.
    NANO LETTERS, 2019, 19 (07) : 4745 - 4751
12345