Vibration Immune, Long-Term Stable and Low Noise Synchronized Mass MEMS Gyroscope

被引：4
|
作者：
Prikhodko, Igor [1 ]
Geen, John [1 ]
Merritt, Carey [1 ]
Zhang, Sam [1 ]
机构：
[1] Analog Devices Inc, Wilmington, MA 01887 USA
来源：
2021 8TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2021) | 2021年
关键词：
MEMS gyroscope; Inertial Measurement Unit; vibration immunity; inertial sensors;
D O I：
10.1109/INERTIAL51137.2021.9430483
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper describes a small size (2.25 mm(2) active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 degrees/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (degrees/hr)/g, bias repeatability of 50 degrees/hr in 10 years, and no observable start-up drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.
引用
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页数：4
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