Vibration Immune, Long-Term Stable and Low Noise Synchronized Mass MEMS Gyroscope

被引：4

作者：

Prikhodko, Igor ^{[1
]}

Geen, John ^{[1
]}

Merritt, Carey ^{[1
]}

Zhang, Sam ^{[1
]}

机构：

[1] Analog Devices Inc, Wilmington, MA 01887 USA

来源：

2021 8TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2021) | 2021年

关键词：

MEMS gyroscope; Inertial Measurement Unit; vibration immunity; inertial sensors;

D O I：

10.1109/INERTIAL51137.2021.9430483

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper describes a small size (2.25 mm(2) active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 degrees/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (degrees/hr)/g, bias repeatability of 50 degrees/hr in 10 years, and no observable start-up drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.

引用

页数：4

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