Nanoimprint patterning of thin cadmium stannate films using a polymeric precursor route

被引:18
|
作者
Schumm, Benjamin [1 ]
Wollmann, Philipp [1 ]
Fritsch, Julia [1 ]
Grothe, Julia [1 ]
Kaskel, Stefan [1 ]
机构
[1] Tech Univ Dresden, Dept Inorgan Chem, D-01069 Dresden, Germany
关键词
TRANSPARENT CONDUCTING OXIDES; SOLAR-CELLS; IMPRINT LITHOGRAPHY; CD2SNO4; FILMS; DEVICES;
D O I
10.1039/c1jm10886g
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The synthesis of cadmium stannate (Cd(2)SnO(4) CTO) nanoparticle powders and the deposition and patterning of thin Cd(2)SnO(4) films were achieved via a polymeric precursor approach. Conditions for the phase formation of the cubic spinel phase were evaluated, and for the first time the system was obtained in single phase powder form from a precursor system. Thin Cd(2)SnO(4) films were prepared by spin coating the polymeric precursor solution followed by thermal treatment. Highly transparent and 20 nm thick films with a minimum sheet resistance of 110 Ohm were prepared. A thermal imprint process with PDMS molds was used for patterning of the films in the sub-micrometre range. Nanostructured CTO films are essential to improve structured electrodes in opto-electronic devices such as CdTe-based thin film solar cells.
引用
收藏
页码:10697 / 10704
页数:8
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