Remote and In-Situ Calibration of Linear Scale by Low-Coherence Tandem Interferometer

被引：0

作者：

Hirai, A. ^{[1
]}

Kitta, J. ^{[2
]}

Kobayashi, F. ^{[3
]}

Sasaki, K. ^{[1
]}

Matsumoto, H. ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Cent 3,1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan

[2] Japan Qual Assurance Org, Tokyo, Tokyo 1578573, Japan

[3] Tokyo Univ Agr & Technol, Koganei, Tokyo 1848588, Japan

来源：

2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9 | 2008年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Technique of transferring length-information between two distantly-located low-coherence-interferometers through a single-mode-optical-fiber for remote and in-situ calibration of linear scale is developed. Results of 200 nm-deviation and 100 mn-standard deviation for 50 mm-length is preliminary achieved. (C) 2008 Optical Society of America

引用

页码：456 / +

页数：2

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