Remote and In-Situ Calibration of Linear Scale by Low-Coherence Tandem Interferometer

被引：0
|
作者：
Hirai, A. [1 ]
Kitta, J. [2 ]
Kobayashi, F. [3 ]
Sasaki, K. [1 ]
Matsumoto, H. [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Cent 3,1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan
[2] Japan Qual Assurance Org, Tokyo, Tokyo 1578573, Japan
[3] Tokyo Univ Agr & Technol, Koganei, Tokyo 1848588, Japan
来源：
2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9 | 2008年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Technique of transferring length-information between two distantly-located low-coherence-interferometers through a single-mode-optical-fiber for remote and in-situ calibration of linear scale is developed. Results of 200 nm-deviation and 100 mn-standard deviation for 50 mm-length is preliminary achieved. (C) 2008 Optical Society of America
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页码：456 / +
页数：2
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