In-Situ Calibration of a Translation Stage by Low-Coherence Tandem Interferometer

被引：0
|
作者：
Hirai, A. [1 ]
Kitta, J. [2 ]
Matsumoto, H. [3 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Cent 3,1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan
[2] Japan Qual Assurance Org, Tokyo 1578573, Japan
[3] Univ Tokyo, Tokyo 1138654, Japan
来源：
2009 CONFERENCE ON LASERS AND ELECTRO-OPTICS AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2009), VOLS 1-5 | 2009年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
For remote and in-situ calibration of translation stage, system comparing optical-path-differences of two distantly-located low-coherence-interferometers through a single-mode-optical-fiber has been developed. Results of 52 nm-deviation and 30 nm-standard deviation for 39 mm-displacement is achieved. (C) 2009 Optical Society of America
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页码：1559 / +
页数：2
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