Low-coherence tandem interferometer for remote calibration of gauge blocks

被引:3
|
作者
Hirai, A [1 ]
Matsumoto, H [1 ]
机构
[1] Natl Metrol Inst Japan, AIST, Tsukuba, Ibaraki 3058563, Japan
关键词
length standards; gauge blocks; remote measurement; low-coherence interferometer; tandem interferometer;
D O I
10.1117/12.505410
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A low-coherence tandem interferometer with a single-mode optical fiber is developed for remote-measurement of length. The optical path difference provided in the first low-coherence interferometer is transmitted through the optical fiber to the second low-coherence interferometer. Low-coherence interference fringes are generated when the optical path difference in the second interferometer, which corresponds to the length being measured, compensates that of the first interferometer. A gauge block of 50 min long has been calibrated remotely through the single-mode optical fiber of 3 km length with a standard deviation of 0.12 mum.
引用
收藏
页码:54 / 61
页数:8
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