Aligned-Crystalline Si Films on Glass

被引：0
|
作者：
Findikoglu, Alp T. [1 ]
Ugurlu, Ozan [1 ]
Holesinger, Terry G. [1 ]
机构：
[1] Los Alamos Natl Lab, MPA STC, Los Alamos, NM 87544 USA
来源：
AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008 | 2008年 / 1066卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We report structural and electronic properties of Aligned-Crystalline Si (ACSi) Films on glass substrates. These films show enhanced majority carrier mobilities and minority carrier lifetimes with increasing crystallinity, i.e., with improving alignment and connectivity of the grains. A 0.4-mu m-thick ACSi film with a total grain mosaic spread of 4.2 degrees showed Hall mobility of 47 cm(2)/V.s for a p-type doping concentration of 1.9x10(18) cm(-3). A prototype n+/p/p+-type diode fabricated using a 4.2-mu m-thick ACSi film showed minority carrier lifetime of similar to 3.5 mu s and estimated diffusion length of similar to 30 mu m in the p layer with a doping concentration of 5x10(16) cm(-3).
引用
收藏
页码：477 / 482
页数：6
相关论文
共 50 条
  • [41] CRYSTALLINE CORRELATION OF EPITAXIAL SI FILMS WITH UNDERLYING SPINEL FILMS IN SI/(MGO AL2O3) SPINEL/SI STRUCTURE
    EGAMI, K
    MIKAMI, M
    TSUYA, H
    APPLIED PHYSICS LETTERS, 1983, 43 (08) : 757 - 759
  • [42] Preparation and characterization of nano-crystalline diamond films on glass substrate
    Lu, FX
    Yang, WB
    Liu, ZL
    Tang, WZ
    Tong, YM
    JOURNAL OF UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING, 2004, 11 (03): : 216 - 220
  • [43] Residual stress of glass and crystalline oxide thin films responding to humidity
    Nishimura, Yuki
    Ohta, Yuma
    Boll, Felix
    Cop, Pascal
    Smarsly, Bernd
    Kozuka, Hiromitsu
    APPLIED PHYSICS LETTERS, 2022, 120 (19)
  • [44] Reflow of Phosphorous Silicate Glass Layer Formed on Textured Si Surface in Crystalline Si Solar Cells
    Kim, Jin-Sung
    Seo, Min-Woo
    Ahn, Kwang-Soon
    Choi, Chel-Jong
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2012, 12 (07) : 5700 - 5703
  • [45] Single-Crystalline-Like Germanium Thin Films on Glass Substrates
    Selvarnanickam, V.
    Jian, C.
    Xiong, X.
    Majkic, G.
    Galtsyan, E.
    2012 38TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2012, : 2592 - 2595
  • [46] Preparation and characterization of nano-crystalline diamond films on glass substrate
    Fanxiu Lu
    Wubao Yang
    Zhilin Liu
    Weizhong Tang
    Yumei Tong Materials Science and Engineering School
    Journal of University of Science and Technology Beijing(English Edition), 2004, (03) : 216 - 220
  • [47] Crystalline Ge Thin Films on Glass by Al-Induced Crystallization
    Shervin, Kaveh
    Kharel, Khim
    Freundlich, Alexandre
    2016 IEEE 43RD PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2016, : 1091 - 1094
  • [48] Repeated epitaxial growth and transfer of arrays of patterned, vertically aligned, crystalline Si wires from a single Si(111) substrate
    Spurgeon, Joshua M.
    Plass, Katherine E.
    Kayes, Brendan M.
    Brunschwig, Bruce S.
    Atwater, Harry A.
    Lewis, Nathan S.
    APPLIED PHYSICS LETTERS, 2008, 93 (03)
  • [49] Planar Hall effect of Permalloy films on Si(111), Si(100), and glass substrates
    Jen, S. U.
    Wang, P. J.
    Tseng, Y. C.
    Chiang, H. P.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (07)
  • [50] Nonequilibrium carrier dynamics in ultrathin Si-on-glass films
    Serafini, J.
    Akbas, Y.
    Crandall, L.
    Bellman, R.
    Williams, C. Kosik
    Sobolewski, Roman
    19TH INTERNATIONAL CONFERENCE ON ELECTRON DYNAMICS IN SEMICONDUCTORS, OPTOELECTRONICS AND NANOSTRUCTURES (EDISON' 19), 2015, 647
12345