Model Based Control of Micro-positioning Stages

被引：0
|
作者：
Tan, Yonghong [1 ]
Xie, Yangqiu [1 ,2 ]
Dong, Ruili [1 ]
He, Hong [1 ]
机构：
[1] Shanghai Normal Univ, Coll Informat Mech & Elect Engn, Shanghai 200234, Peoples R China
[2] Xidian Univ, Sch Elect Engn, Xian 150001, Peoples R China
来源：
PROCEEDINGS OF THE 31ST CHINESE CONTROL CONFERENCE | 2012年
基金：
上海市自然科学基金;
关键词：
positioning stage; piezoelectric actuator; hysteresis; control; sandwich model; ADAPTIVE-CONTROL; IDENTIFICATION; SYSTEMS;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A model based control scheme for micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a sandwich model with rate-dependent hysteresis is used to describe the performance of the stage. Then, a nonlinear model based control strategy is developed to enable the displacement of the stage to track the reference trajectory. Moreover, a robust design scheme is discussed. The experimental results obtained by implementing the proposed method are also presented in this paper.
引用
收藏
页码：4378 / 4382
页数：5
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