Model Based Control of Micro-positioning Stages

被引：0
|
作者：
Tan, Yonghong [1 ]
Xie, Yangqiu [1 ,2 ]
Dong, Ruili [1 ]
He, Hong [1 ]
机构：
[1] Shanghai Normal Univ, Coll Informat Mech & Elect Engn, Shanghai 200234, Peoples R China
[2] Xidian Univ, Sch Elect Engn, Xian 150001, Peoples R China
来源：
PROCEEDINGS OF THE 31ST CHINESE CONTROL CONFERENCE | 2012年
基金：
上海市自然科学基金;
关键词：
positioning stage; piezoelectric actuator; hysteresis; control; sandwich model; ADAPTIVE-CONTROL; IDENTIFICATION; SYSTEMS;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A model based control scheme for micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a sandwich model with rate-dependent hysteresis is used to describe the performance of the stage. Then, a nonlinear model based control strategy is developed to enable the displacement of the stage to track the reference trajectory. Moreover, a robust design scheme is discussed. The experimental results obtained by implementing the proposed method are also presented in this paper.
引用
收藏
页码：4378 / 4382
页数：5
相关论文
共 50 条
  • [31] Design and Control of a Decoupled Micro-positioning Stage Using Corrugated Flexure Units
    Wang, Nianfeng
    Liang, Xiaohe
    Zhang, Zhiyuan
    Li, Canran
    Zhang, Xianmin
    Yang, Lei
    2019 9TH IEEE ANNUAL INTERNATIONAL CONFERENCE ON CYBER TECHNOLOGY IN AUTOMATION, CONTROL, AND INTELLIGENT SYSTEMS (IEEE-CYBER 2019), 2019, : 1038 - 1043
  • [32] Prototype microrobots for micro-positioning and micro-unmanned vehicles
    Kladitis, PE
    Bright, VM
    SENSORS AND ACTUATORS A-PHYSICAL, 2000, 80 (02) : 132 - 137
  • [33] FPGA-based adaptive backstepping fuzzy control for a micro-positioning Scott-Russell mechanism
    Fung, Rong-Fong
    Weng, Ming-Hong
    Kung, Ying-Shieh
    MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2009, 23 (08) : 2671 - 2686
  • [34] Observability and Controllability Analysis for Micro-Positioning Stage Described by Sandwich Model with Hysteresis
    Luo, Na
    Tan, Yonghong
    Dong, Ruili
    ASIAN JOURNAL OF CONTROL, 2017, 19 (02) : 532 - 542
  • [35] A robust adaptive control for micro-positioning of piezoelectric actuators with environment force estimation
    Ghafarirad, H.
    Rezaei, S. M.
    Zareinejad, M.
    Hamdi, M.
    TRANSACTIONS OF THE INSTITUTE OF MEASUREMENT AND CONTROL, 2012, 34 (08) : 956 - 965
  • [36] Dynamic characteristics of flexible micro-positioning platforms based on transfer matrix method
    Xu, Weisheng
    Xu, Tianqi
    Ma, Huixin
    Cao, Yi
    Beijing Hangkong Hangtian Daxue Xuebao/Journal of Beijing University of Aeronautics and Astronautics, 2024, 50 (11): : 3566 - 3577
  • [37] Design of a New Compliant XY Micro-positioning Stage Based on Roberts Mechanism
    Wan, Sicong
    Xu, Qingsong
    2014 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2014, : 139 - 144
  • [38] Micro-positioning of linear piezoelectric motors based on a learning nonlinear PID controller
    Zhou, H
    Tan, KK
    Lee, TH
    PROCEEDINGS OF THE 39TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-5, 2000, : 913 - 918
  • [39] Micro-positioning enabled patch clamp recordings on a chip
    Guia, A
    Wang, YB
    Xu, JQ
    Sithiphong, K
    Yang, ZH
    Cui, CL
    Wu, L
    Han, E
    Xu, J
    BIOPHYSICAL JOURNAL, 2002, 82 (01) : 161A - 161A
  • [40] Guaranteeing Preselected Tracking Control of Loaded Piezoelectric-actuated Micro-Positioning Platform
    Hu, Zedong
    Feng, Ying
    Feng, Junjie
    Yuan, Yuxia
    2019 IEEE 4TH INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS AND MECHATRONICS (ICARM 2019), 2019, : 30 - 35
12345