Model Based Control of Micro-positioning Stages

被引：0
|
作者：
Tan, Yonghong [1 ]
Xie, Yangqiu [1 ,2 ]
Dong, Ruili [1 ]
He, Hong [1 ]
机构：
[1] Shanghai Normal Univ, Coll Informat Mech & Elect Engn, Shanghai 200234, Peoples R China
[2] Xidian Univ, Sch Elect Engn, Xian 150001, Peoples R China
来源：
PROCEEDINGS OF THE 31ST CHINESE CONTROL CONFERENCE | 2012年
基金：
上海市自然科学基金;
关键词：
positioning stage; piezoelectric actuator; hysteresis; control; sandwich model; ADAPTIVE-CONTROL; IDENTIFICATION; SYSTEMS;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A model based control scheme for micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a sandwich model with rate-dependent hysteresis is used to describe the performance of the stage. Then, a nonlinear model based control strategy is developed to enable the displacement of the stage to track the reference trajectory. Moreover, a robust design scheme is discussed. The experimental results obtained by implementing the proposed method are also presented in this paper.
引用
收藏
页码：4378 / 4382
页数：5
相关论文
共 50 条
  • [21] Nonlinear Discrete Prescribed Performance Control for Micro-Positioning of Smart Actuators
    Ramli, Mohd Hanif Mohd
    Chen, Xinkai
    2016 IEEE INTERNATIONAL SYMPOSIUM ON ROBOTICS AND INTELLIGENT SENSORS (IRIS), 2016, : 184 - 189
  • [22] DESIGN AND ANALYSIS OF A MICRO-POSITIONING STAGE
    Chen, Jau-Liang
    Chen, Yan-Ming
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, VOL 7, 2012, : 327 - 334
  • [23] Research on control strategy by charge feedback for piezoelectric micro-positioning mechanism
    National University of Defense Technology, Changsha 410073, China
    不详
    Zhongguo Jixie Gongcheng, 2007, 10 (1205-1207):
  • [24] Design of micro-positioning stage with flexure hinge
    Ma, L. (malian@shu.edu.cn), 1600, Chinese Academy of Sciences (22):
  • [25] Neural-Network Based Model Predictive Control for Piezoelectric-Actuated Stick-Slip Micro-positioning Devices
    Liu, Weichuan
    Cheng, Long
    Zhou, Chao
    Hou, Zeng-Guang
    Tan, Min
    2016 IEEE INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2016, : 1312 - 1317
  • [26] A novel micro-positioning controller for piezoelectric actuators
    Liu, Van-Tsai
    Lin, Chun-Liang
    Huang, Hsiang-Chan
    Jian, Zi-Jie
    INTELLIGENT CONTROL AND AUTOMATION, 2006, 344 : 450 - 455
  • [27] ELECTRONIC MICRO-POSITIONING WITH FERROELASTIC-FERROELECTRICS
    LEMONS, RA
    COLDREN, LA
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (12): : 1650 - 1652
  • [28] Rate-dependent Modeling and Tracking Control for Piezoelectric Micro-positioning Platform
    Wang, Chenyang
    Zhou, Miaolei
    Xu, Rui
    2017 CHINESE AUTOMATION CONGRESS (CAC), 2017, : 568 - 573
  • [29] Design of flexure-based modular architecture micro-positioning stage
    Bingxiao Ding
    Zhixin Yang
    Yangmin Li
    Microsystem Technologies, 2020, 26 : 2893 - 2901
  • [30] Design of flexure-based modular architecture micro-positioning stage
    Ding, Bingxiao
    Yang, Zhixin
    Li, Yangmin
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2020, 26 (09): : 2893 - 2901
12345