Evaluation of Gratings for X-ray and Neutron Phase Imaging Techniques by Using X-ray Projection Microscope

被引：0
|
作者：
Minami, Katsunori [1 ]
Yashiro, Wataru [2 ]
Olbinado, Margie [2 ]
Momose, Atsushi [2 ]
机构：
[1] MARS TOHKEN SOLUT Co Ltd, Xray R&D Dept, 2-27-7 Tamagawa Cyoufu, Tokyo 1820025, Japan
[2] Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Mat Sci, Kashiwa, Chiba 2778561, Japan
来源：
INTERNATIONAL WORKSHOP ON X-RAY AND NEUTRON PHASE IMAGING WITH GRATINGS | 2012年 / 1466卷
关键词：
X-ray microscopy; Nondestructive testing; Computed tomography; X-ray imaging; Talbo (-Lau) interferometry; X-ray phase contrast imaging; TOMOGRAPHY;
D O I：
10.1063/1.4742291
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In the X-ray and neutron Talbot (-Lau) interferometry, fabrication of phase or amplitude grating with a high-aspect ratio is a key factor to obtain high quality images. To improve the ability of the grating, evaluation of shape and thickness variation and feed-back to the fabrication process are essential. Here, it is shown that X-ray projection microscope with a spatial resolution of sub-micrometer is a powerful tool for the purpose. Three kinds of gratings have been evaluated by using a projection X-ray microscope with X-ray source size of 0.6 micrometer. Uniformity of thickness of the grating has been visualized nondestructively.
引用
收藏
页码：193 / 198
页数：6
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