Evaluation of Gratings for X-ray and Neutron Phase Imaging Techniques by Using X-ray Projection Microscope

被引：0

作者：

Minami, Katsunori ^{[1
]}

Yashiro, Wataru ^{[2
]}

Olbinado, Margie ^{[2
]}

Momose, Atsushi ^{[2
]}

机构：

[1] MARS TOHKEN SOLUT Co Ltd, Xray R&D Dept, 2-27-7 Tamagawa Cyoufu, Tokyo 1820025, Japan

[2] Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Mat Sci, Kashiwa, Chiba 2778561, Japan

来源：

INTERNATIONAL WORKSHOP ON X-RAY AND NEUTRON PHASE IMAGING WITH GRATINGS | 2012年 / 1466卷

关键词：

X-ray microscopy; Nondestructive testing; Computed tomography; X-ray imaging; Talbo (-Lau) interferometry; X-ray phase contrast imaging; TOMOGRAPHY;

D O I：

10.1063/1.4742291

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In the X-ray and neutron Talbot (-Lau) interferometry, fabrication of phase or amplitude grating with a high-aspect ratio is a key factor to obtain high quality images. To improve the ability of the grating, evaluation of shape and thickness variation and feed-back to the fabrication process are essential. Here, it is shown that X-ray projection microscope with a spatial resolution of sub-micrometer is a powerful tool for the purpose. Three kinds of gratings have been evaluated by using a projection X-ray microscope with X-ray source size of 0.6 micrometer. Uniformity of thickness of the grating has been visualized nondestructively.

引用

页码：193 / 198

页数：6

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