Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

被引：95
|
作者：
Vaschenko, G [1 ]
Brewer, C
Brizuela, F
Wang, Y
Larotonda, MA
Luther, BM
Marconi, MC
Rocca, JJ
Menoni, CS
机构：
[1] Natl Sci Fdn, Engn Res Ctr Extreme Ultraviolet Sci & Technol, Ft Collins, CO 80523 USA
[2] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA
[3] Lawrence Berkeley Natl Lab, Ctr Xray Opt, Berkeley, CA 94720 USA
[4] Univ Calif Berkeley, Berkeley, CA 94720 USA
来源：
OPTICS LETTERS | 2006年 / 31卷 / 09期
关键词：
D O I：
10.1364/OL.31.001214
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution. (c) 2006 Optical Society of America.
引用
收藏
页码：1214 / 1216
页数：3
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