Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

被引：95

作者：

Vaschenko, G ^{[1
]}

Brewer, C

Brizuela, F

Wang, Y

Larotonda, MA

Luther, BM

Marconi, MC

Rocca, JJ

Menoni, CS

机构：

[1] Natl Sci Fdn, Engn Res Ctr Extreme Ultraviolet Sci & Technol, Ft Collins, CO 80523 USA

[2] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA

[3] Lawrence Berkeley Natl Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[4] Univ Calif Berkeley, Berkeley, CA 94720 USA

来源：

OPTICS LETTERS | 2006年 / 31卷 / 09期

关键词：

D O I：

10.1364/OL.31.001214

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution. (c) 2006 Optical Society of America.

引用

页码：1214 / 1216

页数：3

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