Minifab key to low-cost chip production

被引：0
|
作者：
Okumura, K [1 ]
Mitsutake, K
机构：
[1] Univ Tokyo, Tokyo, Japan
[2] Toshiba Semicond Proc Technol Ctr, Kawasaki, Kanagawa, Japan
来源：
SOLID STATE TECHNOLOGY | 2002年 / 45卷 / 02期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：34 / 34
页数：1
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