Minifab key to low-cost chip production

被引：0

作者：

Okumura, K ^{[1
]}

Mitsutake, K

机构：

[1] Univ Tokyo, Tokyo, Japan

[2] Toshiba Semicond Proc Technol Ctr, Kawasaki, Kanagawa, Japan

来源：

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：34 / 34

页数：1

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