Negative bias temperature instability in n-channel power VDMOSFETs

被引:24
|
作者
Dankovic, D. [1 ]
Manic, I. [1 ]
Davidovic, V. [1 ]
Djoric-Veljkovic, S. [2 ]
Golubovic, S. [1 ]
Stojadinovic, N. [1 ]
机构
[1] Univ Nis, Fac Elect Engn, Nish 18000, Serbia
[2] Univ Nis, Fac Civil Engn & Architecture, Nish 18000, Serbia
关键词
D O I
10.1016/j.microrel.2008.06.015
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Negative gate bias is used in some applications for faster switching off the n-channel MOS devices. It is shown in this Study that NBT stress-related instability in commercial n-channel power VDMOSFETs could be actually more serious than in corresponding p-channel devices. NBT stress is found to create equal V-T shifts in both device types, whereas the subsequent positive bias annealing results in more serious overall V-T instability in n-channel devices. The changes in the densities of stress-induced interface traps in two device types are equal as well, but significant amounts of NBT stress-induced border traps are only found in n-channel devices. All the results are discussed in terms of hydrogen reaction and diffusion model. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1313 / 1317
页数:5
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