Advanced Flip-Chip Package Solution for 28nm Si Node and Beyond

被引：0

作者：

Liu, C. S. ^{[1
]}

Chen, C. S. ^{[1
]}

Lee, C. H. ^{[1
]}

Tsai, H. Y. ^{[1
]}

Pu, H. P. ^{[1
]}

Cheng, M. D. ^{[1
]}

Kuo, T. H. ^{[1
]}

Chen, H. W. ^{[1
]}

Wu, C. Y. ^{[1
]}

Lii, M. J. ^{[1
]}

Yu, Doug C. H. ^{[1
]}

机构：

[1] Taiwan Semicond Mfg Co Ltd, Res & Dev, Hsinchu 30077, Taiwan

来源：

2012 IEEE 62ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) | 2012年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

Next generation flip chip package with <100um fine bump pitch is developed in a cost effective Bump-on-Trace (BOT) package structure for 28nm Si technology node. This is foreseen to be a mainstream for mobile applications in next generations. The key challenges of this new technology include warpage control of molded underfill (MUF) for < 4 mils of thin die, packaging yield due to finer pitch of bumping/substrate design and thermal/mechanical effect on chip-package-interaction (CPI) [1-2]. CPI due to the use of fragile extreme low-k (ELK) dielectric material in the back-end-of-line (BEOL) layers has been fully characterized. The well-integrated Si/bump/package processes enable reliable CPI and assembly yield. An aggressive and reliable Si/bump/package design and CPI approaches are also discussed.

引用

页码：436 / 438

页数：3

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