High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)

被引：9
|
作者：
Zhang, Jianhao [1 ,2 ]
Wu, Rongbo [1 ,2 ]
Wang, Min [3 ,4 ]
Fang, Zhiwei [3 ,4 ]
Lin, Jintian [1 ]
Zhou, Junxia [3 ,4 ]
Gao, Renhong [1 ,2 ]
Chu, Wei [3 ]
Cheng, Ya [1 ,3 ,4 ,5 ,6 ,7 ,8 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China
[4] East China Normal Univ, Sch Phys & Mat Sci, Extreme Optoelectromech Lab XXL, Shanghai 200241, Peoples R China
[5] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China
[6] Shandong Normal Univ, Collaborat Innovat Ctr Light Manipulat & Applicat, Jinan 250358, Shandong, Peoples R China
[7] CAS Ctr Excellence Ultraintense Laser Sci, Shanghai 201800, Peoples R China
[8] Shanghai Res Ctr Quantum Sci, Shanghai 201315, Peoples R China
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2020年 / 59卷 / 08期
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
lithium niobate on insulator; femtosecond laser micromachining; waveguide; GENERATION;
D O I：
10.35848/1347-4065/aba0d6
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report fabrication of low loss infrared single mode (1550 nm) waveguides on lithium niobate on insulator cladded by a layer of SiO2. Our technique, termed photolithography assisted chemo-mechanical etching, relies on patterning of a chromium film into the mask shape by femtosecond laser micromachining and subsequent chemo-mechanical etching of the lithium niobate thin film. The high-index-contrast single mode waveguide is measured to have a propagation loss of 0.130 0.008 dB cm(-1). Furthermore, waveguide tapers are fabricated for boosting the coupling efficiency.
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页数：5
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