High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)

被引:26
|
作者
Wu, Rongbo [1 ,2 ]
Gao, Lang [1 ,2 ]
Liang, Youting [3 ,4 ]
Zheng, Yong [3 ,4 ]
Zhou, Junxia [3 ,4 ]
Qi, Hongxin [3 ,4 ]
Yin, Difeng [1 ,2 ]
Wang, Min [3 ,4 ]
Fang, Zhiwei [3 ,4 ]
Cheng, Ya [1 ,2 ,3 ,4 ,5 ,6 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China
[4] East China Normal Univ, Sch Phys & Elect Sci, XXL Extreme Optoelectromech Lab, Shanghai 200241, Peoples R China
[5] Shandong Normal Univ, Collaborat Innovat Ctr Light Manipulat & Applicat, Jinan 250358, Peoples R China
[6] Shanghai Res Ctr Quantum Sci, Shanghai 201315, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
lithium niobate; electro-optic modulator; insertion loss; photolithography assisted chemo-mechanical etching; BANDWIDTH;
D O I
10.3390/mi13030378
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary interconnection industries and disruptive applications. Here, we demonstrated the design and fabrication of a high performance thin-film LN EO modulator using photolithography assisted chemo-mechanical etching (PLACE) technology. Our device shows a 3-dB bandwidth over 50 GHz, along with a comparable low half wave voltage-length product of 2.16 Vcm and a fiber-to-fiber insertion loss of 2.6 dB. The PLACE technology supports large footprint, high fabrication uniformity, competitive production rate and extreme low device optical loss simultaneously, our result shows promising potential for developing high-performance large-scale low-loss photonic integrated devices.
引用
收藏
页数:9
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  • [1] Thin-film lithium niobate electro-optic isolator fabricated by photolithography assisted chemo-mechanical etching
    Gao, Lang
    Liang, Youting
    Song, Lvbin
    Yin, Difeng
    Qi, Jia
    Chen, Jinming
    Liu, Zhaoxiang
    Yu, Jianping
    Liu, Jian
    Zhang, Haisu
    Fang, Zhiwei
    Qi, Hongxin
    Cheng, Ya
    [J]. OPTICS LETTERS, 2024, 49 (03) : 614 - 617
  • [2] Monolithically integrated electro-optic modulator fabricated on lithium niobate on insulator by photolithography assisted chemo-mechanical etching
    Liang, Youting
    Zhou, Junxia
    Yin, Difeng
    Zheng, Yong
    Qi, Hongxin
    Wang, Min
    Fang, Zhiwei
    Wu, Rongbo
    Cheng, Ya
    [J]. JOURNAL OF PHYSICS-PHOTONICS, 2021, 3 (03):
  • [3] Design of high-bandwidth, low-voltage and low-loss hybrid lithium niobate electro-optic modulators
    Weigel, Peter O.
    Valdez, Forrest
    Zhao, Jie
    Li, Huiyan
    Mookherjea, Shayan
    [J]. JOURNAL OF PHYSICS-PHOTONICS, 2021, 3 (01):
  • [4] Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching
    Li, Chuntao
    Guan, Jianglin
    Lin, Jintian
    Gao, Renhong
    Wang, Min
    Qiao, Lingling
    Deng, Li
    Cheng, Ya
    [J]. OPTICS EXPRESS, 2023, 31 (19) : 31556 - 31562
  • [5] High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)
    Zhang, Jianhao
    Wu, Rongbo
    Wang, Min
    Fang, Zhiwei
    Lin, Jintian
    Zhou, Junxia
    Gao, Renhong
    Chu, Wei
    Cheng, Ya
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2020, 59 (08)
  • [6] Low Loss 1 x 16/40 Flat Type Beam Splitters on Thin Film Lithium Niobate Using Photolithography Assisted Chemo-Mechanical Etching
    Zhu, Zhuangzhuang
    Wang, Zhe
    Fang, Zhiwei
    Lin, Dong
    Zhou, Yuan
    Zhong, Yunxian
    Xu, Jian
    He, Jinping
    Cheng, Ya
    [J]. LASER & PHOTONICS REVIEWS, 2024, 18 (05)
  • [7] Low Loss and Low Vpi Thin Film Lithium Niobate on Quartz Electro-optic Modulators
    Stenger, V. E.
    Toney, J.
    Poilick, A.
    Brown, D.
    Griffin, B.
    Nelson, R.
    Sriram, S.
    [J]. 43RD EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC 2017), 2017,
  • [8] A high-gain cladded waveguide amplifier on erbium doped thin-film lithium niobate fabricated using photolithography assisted chemo-mechanical etching
    Liang, Youting
    Zhou, Junxia
    Liu, Zhaoxiang
    Zhang, Haisu
    Fang, Zhiwei
    Zhou, Yuan
    Yin, Difeng
    Lin, Jintian
    Yu, Jianping
    Wu, Rongbo
    Wang, Min
    Cheng, Ya
    [J]. NANOPHOTONICS, 2022, 11 (05) : 1033 - 1040
  • [9] Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching
    周俊霞
    高仁宏
    林锦添
    汪旻
    储蔚
    李文博
    尹狄峰
    邓莉
    方致伟
    张健皓
    伍荣波
    程亚
    [J]. Chinese Physics Letters, 2020, (08) : 48 - 52
  • [10] Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching
    Zhou, Jun-xia
    Gao, Ren-hong
    Lin, Jintian
    Wang, Min
    Chu, Wei
    Li, Wen-bo
    Yin, Di-feng
    Deng, Li
    Fang, Zhi-wei
    Zhang, Jian-hao
    Wu, Rong-bo
    Cheng, Ya
    [J]. CHINESE PHYSICS LETTERS, 2020, 37 (08)