Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching

被引：0

作者：

周俊霞 ^{[1
,2
]}

高仁宏 ^{[3
,4
]}

林锦添 ^{[3
,5
]}

汪旻 ^{[1
,2
]}

储蔚 ^{[1
,2
]}

李文博 ^{[3
,4
]}

尹狄峰 ^{[3
,4
]}

邓莉 ^{[1
,2
]}

方致伟 ^{[1
,2
]}

张健皓 ^{[3
,4
]}

伍荣波 ^{[3
,4
]}

程亚 ^{[1
,2
,3
,4
,5
,6
,7
]}

机构：

[1] State Key Laboratory of Precision Spectroscopy, East China Normal University

[2] XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science,East China Normal University

[3] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences

[4] University of Chinese Academy of Sciences

[5] Collaborate CAS Center for Excellence in Ultra-intense Laser Science

[6] Innovation Center of Extreme Optics, Shanxi University

[7] Shanghai Research Center for Quantum

来源：

Chinese Physics Letters. | 2020年 / 37卷 / 08期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Optical true delay lines(OTDLs) of low propagation losses, small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications. Here, we report fabrication of electro-optically switchable OTDLs on lithium niobate on insulator using photolithography assisted chemo-mechanical etching.Our device consists of several low-loss optical waveguides of different lengths which are consecutively connected by electro-optical switches to generate different amounts of time delay. The fabricated OTLDs show an ultra-low propagation loss of ～0.03 d B/cm for waveguide lengths well above 100 cm.

引用

页数：5

共 11 条

[1] Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching
周俊霞
高仁宏
林锦添
汪旻
储蔚
李文博
尹狄峰
邓莉
方致伟
张健皓
伍荣波
程亚
[J]. Chinese Physics Letters, 2020, (08) : 48 - 52
[2] Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching
Zhou, Jun-xia
Gao, Ren-hong
Lin, Jintian
Wang, Min
Chu, Wei
Li, Wen-bo
Yin, Di-feng
Deng, Li
Fang, Zhi-wei
Zhang, Jian-hao
Wu, Rong-bo
Cheng, Ya
[J]. CHINESE PHYSICS LETTERS, 2020, 37 (08)
[3] Monolithically integrated electro-optic modulator fabricated on lithium niobate on insulator by photolithography assisted chemo-mechanical etching
Liang, Youting
Zhou, Junxia
Yin, Difeng
Zheng, Yong
Qi, Hongxin
Wang, Min
Fang, Zhiwei
Wu, Rongbo
Cheng, Ya
[J]. JOURNAL OF PHYSICS-PHOTONICS, 2021, 3 (03):
[4] Thin-film lithium niobate electro-optic isolator fabricated by photolithography assisted chemo-mechanical etching
Gao, Lang
Liang, Youting
Song, Lvbin
Yin, Difeng
Qi, Jia
Chen, Jinming
Liu, Zhaoxiang
Yu, Jianping
Liu, Jian
Zhang, Haisu
Fang, Zhiwei
Qi, Hongxin
Cheng, Ya
[J]. OPTICS LETTERS, 2024, 49 (03) : 614 - 617
[5] Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching
Li, Chuntao
Guan, Jianglin
Lin, Jintian
Gao, Renhong
Wang, Min
Qiao, Lingling
Deng, Li
Cheng, Ya
[J]. OPTICS EXPRESS, 2023, 31 (19) : 31556 - 31562
[6] High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)
Zhang, Jianhao
Wu, Rongbo
Wang, Min
Fang, Zhiwei
Lin, Jintian
Zhou, Junxia
Gao, Renhong
Chu, Wei
Cheng, Ya
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2020, 59 (08)
[7] A high-gain cladded waveguide amplifier on erbium doped thin-film lithium niobate fabricated using photolithography assisted chemo-mechanical etching
Liang, Youting
Zhou, Junxia
Liu, Zhaoxiang
Zhang, Haisu
Fang, Zhiwei
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Lin, Jintian
Yu, Jianping
Wu, Rongbo
Wang, Min
Cheng, Ya
[J]. NANOPHOTONICS, 2022, 11 (05) : 1033 - 1040
[8] Monolithic Yb3+-doped thin film lithium niobate microring laser fabricated by photolithography-assisted chemo-mechanical etching technology
Ma, Y. U.
Zhou, J. U. N. X. I. A.
Fang, Z. H. I. W. E. I.
Zhou, Y. U. A. N.
Huang, T. I. N. G.
Zhu, Y. I. R. A. N.
Wang, Z. H. E.
Liu, J. I. A. N.
Liu, Z. H. A. O. X. I. A. N. G.
Wu, R. O. N. G. B. O.
Wang, M. I. N.
Zhang, HAIsU
Cheng, Y. A.
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 2023, 40 (05) : D1 - D4
[9] Monolithic single-frequency microring laser on an erbium-doped thin film lithium niobate fabricated by a photolithography assisted chemo-mechanical etching
Liang, Youting
Zhou, Junxia
Wu, Rongbo
Fang, Zhiwei
Liu, Zhaoxiang
Yu, Shupeng
Yin, Difeng
Zhang, Haisu
Zhou, Yuan
Liu, Jian
Wang, Zhenhua
Wang, Min
Cheng, Ya
[J]. Optics Continuum, 2022, 1 (05): : 1193 - 1201
[10] High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)
Wu, Rongbo
Gao, Lang
Liang, Youting
Zheng, Yong
Zhou, Junxia
Qi, Hongxin
Yin, Difeng
Wang, Min
Fang, Zhiwei
Cheng, Ya
[J]. MICROMACHINES, 2022, 13 (03)

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