共 50 条
- [31] 157nm lithography for 70nm technology node MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS, 2001, : 306 - 307
- [32] Investigation on total scattering at 157nm and 193nm OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES, 2000, 4099 : 65 - 73
- [35] Development of fluoropolymers for pellicle in 157nm lithography Optical Microlithography XVIII, Pts 1-3, 2005, 5754 : 1320 - 1328
- [36] Development of 157nm full field scanners OPTICAL MICROLITHOGRAPHY XVII, PTS 1-3, 2004, 5377 : 806 - 815
- [40] Status 157nm lithography development at IMEC OPTICAL MICROLITHOGRAPHY XVI, PTS 1-3, 2003, 5040 : 640 - 649