Organic Thin Film Transistor Using a Photo-Curable Organic/Inorganic Hybrid Material as a Gate Dielectric

被引:0
|
作者
Hwang, Do-Hoon [1 ]
Yang, Yong Suk [2 ]
Lee, Jeong-Ik [2 ]
Kim, Seong Hyun [2 ]
Park, Oun-Ho [3 ]
Kim, Ho-Cheol [3 ]
Lee, Victor [3 ]
Duboi, Geraud [3 ]
Miller, Robert D. [3 ]
机构
[1] Kumoh Natl Inst Technol, Dept Appl Chem, Kumi 730701, South Korea
[2] Elect & Telecommun Res Inst, Basic Res Lab, Taejon 305350, South Korea
[3] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA
关键词
Polyhedral Oligomeric Silsesquioxane; Photo-Patternable Insulator; Organic Field Effect Transistor;
D O I
10.1166/jnn.2008.IC38
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A polyhedral oligomeric silsesquioxane derivative (POSS-OXT) containing photo-curable 4-membered cyclic oxetane functional groups was used as a gate dielectric of organic field effect transistor. The POSS-OXT was cross-linked and completely solidified by UV irradiation in the presence of a selected photo acid generator, and pinhole free uniform thin film was obtained. We fabricated a metal/insulator/metal device of Au/POSS-OXT (300 nm)/Au with area of 0.7 mm(2) and the measured leakage current and capacitance of the device to evaluate the insulating properties of the POSS-OXT thin film. The maximum current was about 0.25 nA when 40 V was applied to the device. The observed values of the capacitance per unit area and dissipation factor were 11.4 nF/cm(2) and 0.025, respectively. We fabricated an organic thin film transistor with pentacene as the active semiconductor and the photo-cross-linked POSS-OXT as an insulator. A field effect carrier mobility of 0.03 cm(2)/V.s was obtained with the device.
引用
收藏
页码:4561 / 4564
页数:4
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