Metrologic platform with a modulation interference microscope

被引：1
|
作者：
Loparev, A. V. [1 ]
Pravdivtsev, A. V. [1 ]
Ignat'ev, P. S. [1 ]
Indukaev, K. V. [1 ]
Osipov, P. A. [1 ]
Romash, E. V. [2 ]
机构：
[1] OOO Amphora Labs, Moscow, Russia
[2] Moscow State Tech Univ STANKIN, FGBOU VPO, Moscow, Russia
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2012年 / 79卷 / 06期
关键词：
FLATNESS; PHASE;
D O I：
10.1364/JOT.79.000371
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents the results of the development of a unique metrologic platform intended for the study of the nanodefects of an object and the measurement of its surface flatness on large areas. The design of the platform is based on the simultaneous use of modulation interference microscopy and noncontact aeromagnetic guides. The optical layout and an algorithm for obtaining panoramic images are considered. It is shown to be promising to use the metrologic platform in the optics and semiconductor industries. (C) 2012 Optical Society of America.
引用
收藏
页码：371 / 375
页数：5
相关论文
共 50 条
  • [1] Modulation interference microscope
    Osipov, PA
    SARATOV FALL MEETING 2002: LASER PHYSICS AND PHOTONICS, SPECTROSCOPY, AND MOLECULAR MODELING III; COHERENT OPTICS OF ORDERED AND RANDOM MEDIA III, 2003, 5067 : 227 - 233
  • [2] A HIGH-SPEED MODULATION INTERFERENCE MICROSCOPE FOR BIOMEDICAL STUDIES
    Loparev, A. V.
    Ignat'ev, P. S.
    Indukaev, K. V.
    Osipov, P. A.
    Mazalov, I. N.
    Kozyrev, A. V.
    MEASUREMENT TECHNIQUES, 2009, 52 (11) : 1229 - 1235
  • [3] Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures
    A. G. Andreev
    S. N. Grigoriev
    E. V. Romash
    S. V. Bushuev
    P. S. Ignatiev
    A. V. Loparev
    K. V. Indukaev
    P. A. Osipov
    Measurement Techniques, 2012, 55 : 542 - 545
  • [4] Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures
    Andreev, A. G.
    Grigoriev, S. N.
    Romash, E. V.
    Bushuev, S. V.
    Ignatiev, P. S.
    Loparev, A. V.
    Indukaev, K. V.
    Osipov, P. A.
    MEASUREMENT TECHNIQUES, 2012, 55 (05) : 542 - 545
  • [5] A high-speed modulation interference microscope for biomedical studies
    A. V. Loparev
    P. S. Ignat’ev
    K. V. Indukaev
    P. A. Osipov
    I. N. Mazalov
    A. V. Kozyrev
    Measurement Techniques, 2009, 52 : 1229 - 1235
  • [6] SCANNING ACOUSTIC MICROSCOPE IN INTERFERENCE MODE USING FREQUENCY MODULATION METHOD
    CHUBACHI, N
    SANNOMIYA, T
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (01): : 111 - 111
  • [7] HOLOGRAPHIC INTERFERENCE MICROSCOPE
    SNOW, K
    VANDEWAR.R
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (11) : 1406 - &
  • [8] APPLICATIONS OF AN INTERFERENCE MICROSCOPE
    HUXLEY, AF
    JOURNAL OF PHYSIOLOGY-LONDON, 1952, 117 (04): : P52 - P53
  • [9] A CONFOCAL INTERFERENCE MICROSCOPE
    HAMILTON, DK
    SHEPPARD, CJR
    OPTICA ACTA, 1982, 29 (12): : 1573 - 1577
  • [10] A SIMPLE INTERFERENCE MICROSCOPE
    ROSS, IN
    SINGH, S
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1983, 16 (08): : 745 - 746
12345