Metrologic platform with a modulation interference microscope

被引：1
|
作者：
Loparev, A. V. [1 ]
Pravdivtsev, A. V. [1 ]
Ignat'ev, P. S. [1 ]
Indukaev, K. V. [1 ]
Osipov, P. A. [1 ]
Romash, E. V. [2 ]
机构：
[1] OOO Amphora Labs, Moscow, Russia
[2] Moscow State Tech Univ STANKIN, FGBOU VPO, Moscow, Russia
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2012年 / 79卷 / 06期
关键词：
FLATNESS; PHASE;
D O I：
10.1364/JOT.79.000371
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents the results of the development of a unique metrologic platform intended for the study of the nanodefects of an object and the measurement of its surface flatness on large areas. The design of the platform is based on the simultaneous use of modulation interference microscopy and noncontact aeromagnetic guides. The optical layout and an algorithm for obtaining panoramic images are considered. It is shown to be promising to use the metrologic platform in the optics and semiconductor industries. (C) 2012 Optical Society of America.
引用
收藏
页码：371 / 375
页数：5
相关论文
共 50 条
  • [41] INTERFERENCE MICROSCOPE WITH TOTAL WAVEFRONT RECONSTRUCTION
    GABOR, D
    GOSS, WP
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1966, 56 (07) : 849 - &
  • [42] INTERFERENCE-MICROSCOPE BIREFRINGENCE OF FIBERS
    MCLEAN, JH
    TEXTILE RESEARCH JOURNAL, 1971, 41 (01) : 90 - &
  • [43] SCANNING DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPE
    BANKHEAD, AD
    PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1992, 14 (04): : 196 - 205
  • [44] SCHLIEREN, INTERFERENCE, DISPERSION STAINING MICROSCOPE
    MCCRONE, WC
    MICROSCOPE, 1972, 20 (03): : 292 - &
  • [45] AN INTERFERENCE MICROSCOPE FOR THE STUDY OF INHOMOGENEOUS MEDIA
    AMBROSE, EJ
    JOURNAL OF SCIENTIFIC INSTRUMENTS AND OF PHYSICS IN INDUSTRY, 1948, 25 (04): : 134 - 135
  • [46] 325-nm interference microscope
    Chang, FC
    Kino, GS
    APPLIED OPTICS, 1998, 37 (16): : 3471 - 3479
  • [47] PROJECTION INTERFERENCE-FRINGES MICROSCOPE
    SOARES, ODD
    ALMEIDA, SP
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 429 : 159 - 164
  • [48] Combined interference and scanning force microscope
    Danzebrink, HU
    Tyrrell, JWG
    Dal Savio, C
    Krüger-Sehm, R
    OPTICAL METROLOGY IN PRODUCTION ENGINEERING, 2004, 5457 : 158 - 165
  • [49] THE CONFOCAL INTERFERENCE MICROSCOPE AS A SURFACE PROFILOMETER
    HAMILTON, DK
    MATTHEWS, HJ
    OPTIK, 1985, 71 (01): : 31 - 34
  • [50] INTERFERENCE MICROSCOPE EVALUATES JOINT IMPLANTS
    TULLOCH, MH
    PHOTONICS SPECTRA, 1994, 28 (08) : 22 - +
12345