Fabrication and Characterization of Silicon Photonic Waveguides and Devices via Selective Oxidation Process

被引：0

作者：

Wang, Xiaokun ^{[1
]}

Guan, Xiaowei ^{[1
]}

Shi, Yaocheng ^{[1
]}

Dai, Daoxin ^{[1
]}

机构：

[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, Zhejiang Prov Key Lab Sensing Technol, State Key Lab Modern Opt Instrumentat, Hangzhou 310058, Zhejiang, Peoples R China

来源：

2012 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP) | 2012年

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Silicon-on-insulator (SOI) optical waveguides are fabricated via selective oxidation process without any silicon etching step so that the waveguide surface becomes very smooth to achieve low-loss light propagation potentially. A high-Q ring-resonator is also demonstrated.

引用

页数：3

共 50 条

[41] Post fabrication permanent laser trimming of silicon nitride photonic devices
De Paoli, Greta
Jantzen, Senta L.
Bucio, Thalia Dominguez
Skandalos, Ilias
Holmes, Christopher
Smith, Peter G. R.
Milosevic, Milan M.
Gardes, Frederic Y.
2019 IEEE 2ND BRITISH AND IRISH CONFERENCE ON OPTICS AND PHOTONICS (BICOP), 2019,
[42] Fabrication of vertical-taper structures for silicon photonic devices by using local-thickness-thinning process
Abe, Shunsuke
Hara, Hideo
Masuda, Shin
Yamada, Hirohito
JAPANESE JOURNAL OF APPLIED PHYSICS, 2022, 61 (SK)
[43] Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices
Swaminathan, Kierthi
Murakowski, Janusz
Schuetz, Chris
Schneider, Garrett J.
Citla, Bhargav S.
Prather, Dennis W.
MICROMACHING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS IV, 2006, 6110
[44] Fabrication of ZnO nanowire devices via selective electrodeposition
Zhang, Min
Zhou, Zhaoying
Yang, Xing
Ye, Xiongying
Wang, Zhong Lin
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 11 (09) : D69 - D71
[45] Evaluating regression-based techniques for modelling fabrication variations in silicon photonic waveguides
James, Aneek E.
Wang, Alexander
Wang, Songli
Bergman, Keren
APPLICATIONS OF MACHINE LEARNING 2021, 2021, 11843
[46] Novel fabrication methods for 2D photonic crystals in silicon slab waveguides
Prather, DW
Murakowski, J
Venkataraman, S
Peng, Y
Balcha, A
Dillon, T
Pustai, D
MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS, 2003, 4984 : 89 - 99
[47] Fabrication and characterization of metal-molecule-silicon devices
Scott, Adina
Janes, David B.
Risko, Chad
Ratner, Mark A.
APPLIED PHYSICS LETTERS, 2007, 91 (03)
[48] Fabrication and characterization of silicon nitride waveguides for mid-infrared applications
de Oliveira, Emerson C.
Gerosa, Rodrigo M.
Phelan, Ciaran
de Matos, Christiano J. S.
2019 SBFOTON INTERNATIONAL OPTICS AND PHOTONICS CONFERENCE (SBFOTON IOPC), 2019,
[49] Fabrication and Characterization of Edge-Conformed Graphene-Silicon Waveguides
Horvath, Cameron
Bachman, Daniel
Mi, Guangcan
Vien Van
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 27 (06) : 585 - 587
[50] Open-window BH process for the fabrication of integrated photonic devices
Sun, Y
Chen, Z
Ji, XM
Choa, FS
APPLICATIONS OF PHOTONIC TECHNOLOGY 6: CLOSING THE GAP BETWEEN THEORY, DEVELOPMENT, AND APPLICATION, 2003, 5260 : 439 - 441

← 1 2 3 4 5 →