Silicon-on-insulator asymmetric optical switch based on total internal reflection

Based on large cross-section single-mode rib waveguide condition, total internal reflection (TIR) and plasma dispersion effect, a silicon-on-insulator (SOI) asymmetric optical waveguide switch with transverse injection structure has been proposed and fabricated, in which the SOI technique utilizes silicon and silicon dioxide thermal bonding and hack-polishing The device performance is measured at the wavelength of 1.3 mu m. It shows that the extinction ratio and insertion loss are less than -18.1 and 6.3 dB, respectively, at an injection current of 60 mA. Response time is 110 ns.