Silicon-on-insulator micro-mechanical optical switch with post processed polymeric waveguides

被引：2
|
作者：
Bakke, T [1 ]
Tigges, CP [1 ]
Sullivan, CT [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
MOEMS AND MINIATURIZED SYSTEMS II | 2001年 / 4561卷
关键词：
optical switch; silicon on insulator; polymeric waveguides; post-processing;
D O I：
10.1117/12.443078
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micro-mechanical optical switch based on lateral deflection of a waveguide is described. The switching element is a suspended silicon beam formed by deep reactive ion etching and release of silicon-on-insulator (SOI). Actuation is implemented using integrated electrostatic comb drives. Dry etched polymeric optical waveguides are post processed onto the mechanical structure. We present design, simulations, and preliminary experimental results.
引用
收藏
页码：85 / 92
页数：8
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